DPS2015 - 37th International Symposium on Dry Process

Scope

The 37th International Symposium on Dry Process (DPS2015) will be held at Awaji Yumebutai International Conference Center, Awaji Island, in Japan, on November 5 & 6, 2015.
The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than three decades.

Conference Hotel　-　The Westin  Awaji Island Resort & Conference Center (Starwood Hotels)

Important dates

Recent Updates

• Nov. 2, 2015 Submission deadline to JJAP extended to November 11, 2015.
• Oct. 21, 2015 On-line registration is closed. On-site registration is available for those who would like to attend the DPS2015.
• Oct. 15, 2015 Presentation Guidelines and Poster Program opened.
• Oct. 05, 2015 Timetable updated. 
• Sep. 16, 2015 JJAP special issue On-Line Submission is opened.
• Sep. 11, 2015 Timetable(Tentative) is available.
• Sep. 4, 2015 Call for Late News (Postdeadline) Papers.
• Aug. 31, 2015 Notification of abstract acceptance will be announced by the early of September, 2015.
• Aug. 3, 2015 On-line submission system was closed.
• Jul. 24, 2015 Submission deadline extended to August 03, 2015.
• Jul. 7, 2015 Submission deadline extended to July 24, 2015.
• Jul. 1, 2015 On-Line Registration opened.
• Jun. 23, 2015 Accommodation opened.
• Jun. 5, 2015 Updeted (News for the Special Issues of Japanese Journal of Applied Physics (JJAP)).
• May 15, 2015 Invited Speakers and tentative titles opened.
• May 15, 2015 On-Line Submission system is opened.
• Feb .9, 2015  DPS2015 website open.

News for the Special Issues of Japanese Journal of Applied Physics (JJAP).

• The deadline for manuscript submission has been extended to November 11, 2015!!
• PUBLICATION CHARGE 2015 will be reduced at half the price.
  New publication charge is 20000JPY/article.
  https://journals.jsap.jp/jjap/special-issues/information
• JJAP Special Issues for DPS2014 is published in the web site(Free article);
  http://iopscience.iop.org/1347-4065/54/6S2

News for Japanese members

応用物理学会プラズマエレクトロニクス分科会の協賛により、「第26回プラズマエレクトロニクス講習会」を 2015年11月20日(金)に東京大学 本郷（浅野）キャンパス 武田先端知ビル 「武田ホール」にて開催致します。
同講習会では、産業応用で必要とされる産業応用で必要とされるプロセスプラズマの生成、制御、計測の基礎と、その先端応用技術について、各分野にて第一線でご活躍の先生方より御講義頂く予定です。詳しくはこちら をご参照ください。