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Sputtering and Plasma Process Sub-Division

The Vacuum Society of Japan

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Rm 306, Kikaishinko-kaikan,3-5-8 Shiba-koen, Minato-ku,Tokyo 105-0011, Japan
TEL: +81-3-3431-4395 FAX: +81-3-3433-5371 E-mail: ofc-vsj@vacuum-jp.org